美国原装进口BROOKS 5853E气体质量流量控制器 5863E气体质量流量计

Settling Time

Less than 3seconds to within 2% full scale of final value for a0- command change. 

Repeatability 0.25% ofrate 

Sensitivity to Mounting Attitude ±0.5% fullscale maximum deviation from specified accuracyafter re-zeroing 

Temperature Sensitivity Zero: Lessthan ±0.075% F.S. per degree C Span: Lessthan ±1.0% F.S. shift from original calibration over 50°Fto 122°F range (10°C to 50°C) Pressure Sensitivity (Model 5853E) ±0.03% perpsi up to 200 psig (N2) 

Ratings: Operating pressure 1500 psig(100 bar) maximum 

Differential Pressure (Model 5853E) Standard:High differential valve 30 to 290 psid Optional:Low differential valve 7.5 to 30 psid (<500 slpm)11.8 to 30psid (>500 slpm)

Temperature Ambient/Gas 41°F to149°F (5°C to 65°C) 

Leak Integrity, Outboard 1 x10-9atm cc/sec.Helium (excluding permeation)

Materials of Construction WettedParts — 316 Stainless Steel with Viton®fluoroelastomers,Buna-N or PTFE/Kalrez®