Mass Flowmeter Model 5861E
Features and benefits
•Mass flow measurement
•Fast response - flow signal less than 3 seconds to98%of final value
•±1% full scale accuracy including linearity
•Wide flow range (upto 100 slpm N2,200 slpm H2)
•Repeatability: ±0.25% of rate
•Linear output signal, 0-5 Vdc
•All wetted parts are 316 stainless steel
•No moving parts
•All solid state electronics
•Compact
•Removable sensor
•Insensitive to mounting attitude
优势
全金属流路可确保气体纯度并降低泄漏风险
采用可拆卸式流量传感器，无需对气压进行连续监测和重新调节
易于安装和保养
